Applications
- Thin film step height measurements
- Thick film step height measurements
- Photo resist / soft films
- Etched trench depth
- Materials characterization for surface roughness and waviness
- Surface curvature and form
- 2D stress of thin films
- Dimensional analysis and surface texture
- 3D imaging of various surfaces
- Flatness or curvature
- Defect review and defect analysis
- And many more
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